The role of tribo-chemical processes in the friction and wear behavior of contacts in nanolithographic systems
Fiona Elam  1, *, @  , Feng-Chun Hsia  1, @  , Camila Blanco-Bilbao  2, @  , Bart Weber  1, @  , Steve Franklin  3, @  
1 : ARCNL
2 : Department of Materials Science and Engineering [Sheffield]
3 : ASML
* : Corresponding author
Subject : : oral
Topics : 7.1 Physico-chemistry
Keywords : Friction ; Surface topography ; Tribofilms and 3rd bodies ; Wear
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