The role of tribo-chemical processes in the friction and wear behavior of contacts in nanolithographic systems
Fiona Elam  1, *@  , Feng-Chun Hsia  1@  , Camila Blanco-Bilbao  2@  , Bart Weber  1@  , Steve Franklin  3@  
1 : ARCNL
2 : Department of Materials Science and Engineering [Sheffield]
3 : ASML
* : Corresponding author

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